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Information × Registration Number 2114U001414, Article popup.category Стаття Title popup.author popup.publication 01-01-2014 popup.source_user Сумський державний університет popup.source http://essuir.sumdu.edu.ua/handle/123456789/38063 popup.publisher Polish Academy of Sciences Institute of Physics Description Current paper presents the results of investigating of nanostructured cathode arc vacuum evaporation coatings, based on (Ti, Hf, Nb, Si)N. Several methods of the structural and elemental analysis were used: proton microbeam, nano- and micro-electron beam, X-ray diffraction analysis. To determine tribological properties (scratch resistance, adhesive and cohesive strength) of the coatings, scratch testing were conducting. Influence of thermal annealing at temperatures 300, 500, 800, 1000 C on elemental composition, microstructure, residual stress, phase composition, profiles of atomic distribution in the coatings were investigated. popup.nrat_date 2025-05-12 Close