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Інформація × Реєстраційний номер 2115U001820, Матеріали видань та локальних репозитаріїв Категорія Thesis Назва роботи About Peculiarities of the Influence of the Negative Bias Potential Applied to the Substrate During the Deposition Process on the Structural State and Properties of the Multilayer system MoN-CrN Автор Дата публікації 01-01-2015 Постачальник інформації Сумський державний університет Першоджерело http://essuir.sumdu.edu.ua/handle/123456789/42799 Видання Sumy State University Опис Applying transition metal nitrides of Mo and Cr, which are characterized by a relatively low heat of formation, as the components of the multilayer coating, the possibilities of elemental and structural engineering of vacuum-arc coatings under the influence of the bias potential Us and the reaction gas pressure PN are revealed. It was found that at a relatively small thickness of the layers of nanometer range, which provides superhard state of the coatings, the supply of Us with the value of above the critical leads to a drop in hardness, which can be explained by mixing of layers at the interphase boundary. Додано в НРАТ 2025-05-12 Закрити