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Head: Druzhynin Anatoliy O.. Development of scientific and technological foundations for the fabrication of micro- and nanosystem elements based on main sensor semiconductor crystals and nanostructures. (popup.stage: ). Lviv Polytechnic National University. № 0222U003150

Head: Druzhynin Anatoliy O.. Development of scientific and technological foundations for the fabrication of micro- and nanosystem elements based on main sensor semiconductor crystals and nanostructures. (popup.stage: ). Lviv Polytechnic National University. № 0221U104527

Head: Yerokhov Valerii Yu.. Two-dimensional periodic silicon nanostructures for MEMS-compatible integrated microconverters. (popup.stage: ). Lviv Polytechnic National University. № 0221U102595

Head: Дружинін Анатолій Олександрович. Converters of physical quantities based on the basis of semiconductor micro- and nanostructures as elements of microsystem technology of information and measurement systems. (popup.stage: ). Lviv Polytechnic National University. № 0219U102097