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Information × Registration Number 0221U104527, 0120U102202 , R & D reports Title Development of scientific and technological foundations for the fabrication of micro- and nanosystem elements based on main sensor semiconductor crystals and nanostructures popup.stage_title Head Druzhynin Anatoliy O., Доктор технічних наук Registration Date 29-03-2021 Organization Lviv Polytechnic National University popup.description2 The methods of obtaining experimental samples of filamentary crystals and nanostructures (Si, SiGe, InSb, InAs) of a given composition, surface morphology, stoichiometry, doping level and geometric dimensions have been improved. The influence of features of structure of the received samples on their basic electrophysical characteristics is established. The introduction of methods for obtaining filamentary crystals and nanostructures with predetermined properties makes it possible to create on their basis highly sensitive sensors and transducers of physical quantities, which will contribute to the development of the sensor industry.  Product Description popup.authors Budzhak Yaroslav S Kutrakov Oleksii P Liakh-Kaguy Natalia S Mazur Valeriya Yu. Nichkalo Stepan I Ostrovskii Igor P Temirova Olena Kh Khoverko Yuriy M Shcherban Natalia O popup.nrat_date 2021-03-29 Close