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Information × Registration Number 0210U000738, 0109U000569 , R & D reports Title The establishing of the correlation between the film structure elements and the surface temperature arising during its deposition by magnetron sputtering popup.stage_title Head Shaginyan Leonid Robertovich, Registration Date 19-03-2010 Organization I.N.Frantsevich Institute for Probmens of Materials Sciences Ukrainian Academy of Science popup.description2 The structure of Cr, Ti, Mo films has been studied using electron microscopy and electron diffraction methods. It is proved that the film structure gradient developed along its thickness is a result of a steep surface temperature rise during the film formation. It is also shown that the film structure is a function of the flux of energy delivering at the condensation surface during the film growth. The model of the film structure as a function of the two deposition parameters - normalized surface temperature and the flux of energy at the condensation surface is suggested. The model allows the prediction of the possible type of the film structure. Product Description popup.authors Даниленко М.І. Куліковський В. Ю. popup.nrat_date 2020-04-02 Close